SEMI S2 Safety Evaluations ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT (SEMI S2)
The semiconductor industry has developed a set of guidelines that address the performance and safety of semiconductor equipment. The SEMI S2 guideline defines minimum performance-based safety requirements that address a number of hazards, including chemical, electrical, fire safety, sound, radiation, mechanical, and seismic. The report also includes an ergonomic evaluation. These requirements are created and periodically updated by industry working committees.
Who needs to comply with SEMI S2? Manufacturers of equipment used to manufacture, measure, assemble, and test semiconductor products
SEMI S2 in brief Semi S2 is intended as a set of performance-based environmental, health, and safety (EHS) considerations for semiconductor manufacturing equipment, in part similar to the Machinery Directives Essential Health and Safety Requirements. SEMI S2 makes reference to other SEMI documents that make full provision for the environmental, health and safety aspects of the design of SEMI equipment.
Full list of SEMI guidelines:
SEMI S1 Equipment Safety Labels
SEMI S2 Safety Guidelines for Semiconductor Manufacturing Equipment
SEMI S3 Heated Chemical Baths
SEMI S4 Segregation/Separation of Gas Cylinders Contained in Cabinets
SEMI S5 Flow-Limiting Devices
SEMI S6 Ventilation
SEMI S8 Ergonomics Engineering
SEMI S9 Electrical Design Verification Tests (now moved to SEMI S22)
SEMI S10 Risk Assessment
SEMI S11 Equipment Mini-environments
SEMI S12 Equipment Decontamination
SEMI S13 Operation and Maintenance Manuals
SEMI S14 Fire Risk Assessment and Mitigation
SEMI S15 Toxic and Flammable Gas Detection Systems
SEMI S16 Equipment Disposal
SEMI S17 Unmanned Transport Vehicle (UTV) Systems
SEMI S18 Gas Handling
SEMI S19 Training of Semiconductor Manufacturing Equipment Installation, Maintenance and Service Personnel
SEMI S20 Identification and Documentation of Energy Isolation Devices for Hazardous Energy Control
SEMI S22 Electrical Design
How do you demonstrate that your equipment complies with SEMI requirements? Assessment to SEMI S2 and other SEMI requirements is achieved by a third party examination of the equipment. It must be performed by a body that has no commercial stake in the equipment. This is then documented in a full assessment report.
How Technology International can assist you for SEMI S2 and other assessments: Technology International has a wide range of experience in conducting SEMI S2 and other evaluations for all types of semiconductor equipment. These evaluations are performed at the clients facility and include a series of risk analyses, design evaluations and safety testing. We specialize in developing reports that offer clients the most flexibility for future product changes and improvements while minimizing upfront costs.
Cost Savings: Technology International can help reduce overall certification costs associated with SEMI S2 evaluations and CE Marking by performing the SEMI and Machinery (or Low Voltage) safety evaluations at the same time. This results in up to a 40% reduction of the total charge, compared to separate evaluations.
Customers: Technology International has been involved in the semi industry for over 10 years working with many of the leading semiconductor equipment manufacturers.
