SEMI S2 Guideline

What is the SEMI S2 Safety Guideline?

The SEMI S2 Safety Guideline, commonly referred to as the SEMI S2 Safety Standard, is the Environmental, Safety, and Health Guideline for semiconductor equipment. The S2 Guideline is considered the core guideline of the SEMI “S Series”, meaning that all other S series Guidelines can be viewed as supporting the S2 Guideline.

The purpose of the S2 Guideline is to ensure that semiconductor manufacturing equipment is compliant with current best safety practice in the industry . To prove compliance, an assessment of the equipment is performed and a detailed report is provided.

The SEMI S2 Safety Guideline is driven by the end user, not the government. Because SEMI Safety Guidelines are internationally recognized, complying with the S2 Guideline contributes to the marketability of your product. Most purchasers of semiconductor and flat panel manufacturing and inspection tools require a SEMI S2 Report before purchasing equipment to validate the equipment’s safety and design.

How to Know if the SEMI S2 Guideline is Applicable to Your Equipment

The S2 Guideline applies to the vast majority of products in the semiconductor manufacturing industry. SEMI S2 is relevant to both the hardware components and the integrated systems supporting semiconductor fabrication; the scope of SEMI S2 spans the installation, operation, and maintenance phases. If your equipment is intended for use in semiconductor manufacturing, the SEMI S2 Guideline likely applies to your equipment.